RDL process
Incoming carrier
(玻璃)載具來料
1
Dielectric layer coating
雷射玻璃層塗佈
2
Release layer coating
介電材塗佈
3
Ti/Cu seed layer
種子層濺鍍
4
RDL PR coating (Exp/Dev)
再佈線層光阻塗佈
5
RDLplating
再佈線層電鍍
6
PR strip
光阻剝除
7
Seed layer etching
種子層刻蝕
8
Assembly process
組裝製程
Flux coating/jetting
助焊劑噴塗
1
Flip chip
倒裝
2
Reflow
回流焊
3
Flux clean
助焊劑清洗
4
Underfill dispensing
底部填充膠
5
Molding (Grinding)
塑封(研磨)
6
Carrier de-bond
載具剝除(清洗)
7
Laser via opening
雷射
8
Ball mount
植球
9
Reflow
回流焊
10
Flux clean
助焊劑清洗
11
Package saw
封裝切割
12